High-rate reactive magnetron sputter deposition and characterization of metal oxide films /
Wedi'i Gadw mewn:
| OCLC: | 47068374 |
|---|---|
| Prif Awdur: | |
| Awdur Corfforaethol: | |
| Iaith: | English |
| Cyhoeddwyd: |
Uppsala :
Acta Universitatis Upsaliensis,
2000.
|
| Cyfres: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;
520. |
| Pynciau: | |
| Fformat: | Traethawd Ymchwil Monograph Note that CRL will digitize material from the collection when copyright allows. |