High-rate reactive magnetron sputter deposition and characterization of metal oxide films /
Saved in:
| OCLC: | 47068374 |
|---|---|
| Main Author: | |
| Corporate Author: | |
| Language: | English |
| Published: |
Uppsala :
Acta Universitatis Upsaliensis,
2000.
|
| Series: | Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;
520. |
| Subjects: | |
| Format: | Thesis Monograph Note that CRL will digitize material from the collection when copyright allows. |
| LEADER | 01741cam a2200421Ia 4500 | ||
|---|---|---|---|
| 001 | in00006251969 | ||
| 003 | OCoLC | ||
| 005 | 20070305102401.0 | ||
| 008 | 010605s2000 sw a b 000 0 eng d | ||
| 020 | |a 9155446833 | ||
| 020 | |a 9789155446833 | ||
| 029 | 1 | |a NLGGC |b 193102013 | |
| 035 | |a (OCoLC)47068374 | ||
| 040 | |a UUM |c UUM |d OCLCQ |d BAKER |d CRL | ||
| 049 | |a CRLL | ||
| 090 | |a TA418.9.T45 |b O57 2000 | ||
| 099 | |a P-00449335 | ||
| 100 | 1 | |a Olsson, Maryam Kharrazi. | |
| 245 | 1 | 0 | |a High-rate reactive magnetron sputter deposition and characterization of metal oxide films / |c by Maryam Kharrazi Olsson. |
| 260 | |a Uppsala : |b Acta Universitatis Upsaliensis, |c 2000. | ||
| 300 | |a 78 p. : |b ill. ; |c 25 cm. | ||
| 336 | |a text |b txt |2 rdacontent. | ||
| 337 | |a unmediated |b n |2 rdamedia. | ||
| 338 | |a volume |b nc |2 rdacarrier. | ||
| 490 | 1 | |a Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; |v 520. | |
| 502 | |b doctoral |c Uppsala University. | ||
| 504 | |a Includes bibliographical references (p. 72-78) | ||
| 650 | 0 | |a Thin films. | |
| 650 | 0 | |a Sputtering (Physics) | |
| 650 | 0 | |a Metallic oxides |x Surfaces. | |
| 650 | 0 | |a Magnetrons. | |
| 710 | 2 | |a Uppsala universitet. | |
| 752 | |a Sweden. | ||
| 830 | 0 | |a Acta Universitatis Upsaliensis. |p Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; |v 520. | |
| 907 | |a .b22111359 |b 03-04-22 |c 03-05-07 | ||
| 998 | |a diss |b 03-05-07 |c m |d - |e - |f eng |g sw |h 0 |i 1 | ||
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